Abstract
Microscopic parabolic surfaces have been fabricated in thick positive photoresist by exposing it using a suitably designed mask on an X5 stepper projection reduction system. The resulting cylindrical parabolic surfaces were coated with reflective material to form parabolic micromirrors. Measurement results of focal length are in agreement with the expected theoretical values. The devices form the basis for the fabrication of compound parabolic microreflectors which are very suitable for thin solar cells.
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