Abstract
TiO 2 gel films were prepared from titanium tetra-n-butoxide modified with 1-(2-hydroxyphenyl)-3-phenyl-2-propen-1-one in 1-butanol by the sol-gel method. The obtained gel film showed an absorption band, characteristic of the chelate ring, at 425 nm. The absorption band was shifted to the longest wavelength region in the photosensitive gel films which we have examined. The band gradually decreased in intensity by UV-irradiation using a high pressure mercury lamp. This indicates that the gel film is photosensitive. Using the photosensitivity, fine patterns (about 3 μm) could be fabricated by the UV-irradiation through a mask and leaching.
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