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Abstract
Chip based particle sensing using 3D capillary fill microfluidics integrated with monolithically integrated lasers and photodetectors is used to demonstrate the feasibility of true chip scale photonic measurements of fluids. The approach is scalable and manufactured using industry standard compound semiconductor fabrication tools. The need for fluid speed regulation via external pumps is removed by measuring local particle velocity at the point of interrogation and particle position within the fluid flow is derived from multiple time resolved forward scattered light signals. Particle size discrimination of 10 and 15 μm polystyrene microbeads is used as an example.
Highlights
Tremendous progress has been made in the past few years in the class of devices that combines optics and fluidics demonstrating optical devices that are reconfigurable using fluid properties, optical devices to sense fluidic properties and the detection of particles flowing in fluids [1,2,3,4]
We propose and demonstrate the feasibility of an approach based on combining an active semiconductor substructure, for on-chip electrically driven reconfigurable lasers and detectors, integrated with capillary fill microfluidics, where fluid velocity is monitored at the interrogation point, all created with industry standard fabrication equipment
In this paper we introduce a methodology for combining capillary fill microfluidics with compound semiconductor photonic integrated circuits to enable self-contained microfluidic systems using techniques that are compatible with wafer scale manufacturing
Summary
Tremendous progress has been made in the past few years in the class of devices that combines optics and fluidics demonstrating optical devices that are reconfigurable using fluid properties, optical devices to sense fluidic properties and the detection of particles flowing in fluids [1,2,3,4]. Implementation is not simple as the fluid flow is less controlled than with an external pump and, as the quantity of fluid being pulled by the surface forces at the fluid front increases, the fluid velocity decreases with time. Stop / start control of fluid flow can be achieved by abruptly changing channel dimension and fluid velocity can be controlled by continuously changing channel dimensions [6] but this can be impractical for large channel lengths. Control of the particle position within the fluid flow is limited due to the lack of external control of the hydrodynamic forces. In what follows we monitor particle velocity using optical devices and correct for particle position
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