Abstract
The design of an ultraprecision displacement sensor with sub-nanometre resolution is proposed for the use of ultraprecision technologies. The sensor is based on the highly sensitive detection of power change at a specific point in light reflected from an object surface when the surface is subject to a small displacement. The sensor consists of a single light source, the reflective object and reference surfaces, optical fibre bundles for tranmission of the illuminating and the reflected light, and the photodiode set-up. In operation, the object and the reference surfaces are illuminated by light transmitted through the optical fibre bundle from the single light source. The reflected light from both surfaces is then transmitted through the optical fibre bundle to two individual but equivalent photodiodes. By using a differential amplifier, the diodes give a highly sensitive displacement signal which is included in the total signal of the reflected light. The sensor proposed has some distinctive features in its performance, such as non-contact measurement, a high resolution of 0.5 nm, a wide working range of about 30 μm within 5% linearity, and the sufficient stability of 1 nm in 20 s for specific research purposes.
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