Abstract

The phase transformation of yttria-stabilized zirconia (ZrO2)0.92(Y2O3)0.08 (8YSZ) thin films used as an electrolyte layer in micro-solid oxide fuel cells (µ-SOFCs) is investigated. Amorphous 8YSZ thin films are deposited by spray pyrolysis and their crystal symmetry, phase transformation and pore formation during heat treatment are analyzed. Both, microstructure and phase transformation can affect the thin film properties such as electrical conductivity and therefore the overall performance of the µ-SOFC.

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