Abstract

The phase composition of the microdefects in Te-doped GaAs single crystals grown by the Czochralski technique with a free carrier density n 0 =5×10 17 –5×10 18 cm −3 was investigated. Ga 2 Te 3 phase reflections appeared in the X-ray diffraction patterns. Nonmonotonic dependences of the relative volume fraction and the coherent scattering domain size of Ga 2 Te 3 on Te doping level were obtained. The possible causes of the nonmonotonic variation in the structural parameters of the Ga 2 Te 3 phase with increase of Te concentration in GaAs are discussed.

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