PFC emission-reduction strategy for the LCD industry

Abstract

— The perfluorocarbons (PFCs) used as etching-process and chamber-cleaning gases in the manufacture of LCD devices have a high global-warming potential and a long atmospheric lifetime. Thus, to voluntarily reduce these environmentally harmful PFCs, in 2001 the Japanese LCD association established the World LCD Industry Cooperation Committee (WLICC), together with its counterpart associations in the Republic of Korea and Taiwan. Since that time involving many discussions, the WLICC reached a consensus on reducing the aggregate absolute PFC emissions to the equivalent of less than 0.82 million metric tons of carbon by 2010. Each association has been taking whatever emission reduction steps it considers best to achieve this goal. Thanks to these measures, the PFC emissions from the Japanese LCD industry have remained at the same level, or less, than those of the year 2000, in spite of the fact that PFC purchases have continually increased. In the interim, the Japanese LCD association has been obtaining experimental data for the 2006 IPCC Inventory Guidelines, which will give the emission factors needed to estimate the PFC emissions. As a result, some data are quite different from emission factors given in the current 2000 Inventory Guidelines. All the data obtained have been submitted to the IPCC to be adopted in the new 2006 Guidelines.