Abstract
This paper presents the performance of three different micro-electro mechanical systems (MEMS)-based surface acoustic wave (SAW) devices for sensing hydrogen gas. All three devices, namely, Device 1, Device 2 and Device 3, were constructed with the same dimensions but with varying geometries. The devices were simulated using COMSOL Multiphysics and various analyses such as deflection, electric potential, frequency shift with respect to the concentration of hydrogen gas, total capacitance of interdigital transducers (IDTs) and sensitivity were performed using finite element modeling. The devices were constructed with a lithium-niobate piezoelectric substrate and a ZnO sensing layer. The performance of MEMS-based SAW devices can be improved by doping with nanomaterials. The devices were tested with hydrogen gas at concentration from 10[Formula: see text]ppm to 100[Formula: see text]ppm. Owing to the mass loading effect, Device 3 exhibited maximum sensitivity and a close approximation of the simulated results with the theoretical results.
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