Abstract
n order to meet the requirement of high vacuum in MEMS devices, an improved Ti-based thin film getter with porous nickel scaffold was prepared by using dynamic hydrogen bubble template (DHBT) method, which finally effectively increased the specific surface area (SSA) and improved the adsorption performance. The microstructure and adsorption performance of the getter were studied by scanning electron microscope, BET, thermogravimetric analysis (TGA) and hydrogen adsorption test. The results show that the SSA of the prepared porous nickel scaffold can reach up to 11.622 m2/g. The aspect ratio of mesopores is around 2. The Ti film deposited on the scaffold have a good coating effect on the porous structure and have little effect on the aspect ratio. When the deposition thickness is 300 nm, the adsorption capacity (3.51374 mg) and adsorption rate (6.507 × 10−4mg/(s∙g)) can reach the highest. Hydrogen adsorption tests also show that the Ti-based thin film getter with porous nickel scaffold has a good repeatability, and its average initial adsorption rate reaches 8.195ml/(s∙cm2), which is nearly an order of magnitude higher than that of the two-dimensional planar getter.
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