Patterning of graphene microscale structures using electrohydrodynamic atomisation deposition of photoresist moulds

Abstract

In this reported work, a graphene suspension was atomised and deposited using the electrohydrodynamic atomisation technique, enabling the formation of a wide range of graphene thin films. The influences of the atomisation-substrate distance on the characteristics of the graphene films and their sheet resistances were analysed. A distance of 3 mm was found to be the optimum deposition distance for this graphene suspension to produce an even film and a low sheet resistance. At a lower and a higher working distance the graphene films exhibited a sharp-angled heave surface behaviour and a high sheet resistance. In addition, electrohydrodynamic atomisation combined with a photolithography polymeric micromoulding technique was used to form graphene structures. After removing the photoresist micromould, the graphene structures remained under well-arranged characteristics. After two layers of electrohydrodynamic atomisation deposition at a working distance of 3 mm, the thickness of the film was approximate to 400 nm and exhibited a sheet resistance of 127.5 sq(-1) (ohms per square).