Abstract

Multipolar plasma confinement is known to result in enhanced plasma density, homogeneous plasma of a large volume, and quiescent plasmas. The effects of a multipolar magnetic field on the dc discharge are confirmed using the particle-in-cell/Monte Carlo (PIC/MC) method. The gas is argon. The present PIC/MC simulation made it possible to consider three roles: (1) magnetic mirror effect near the cusp of two magnetic poles, (2) suppressed electron diffusion in the direction normal to magnetic field line, and (3) electron repelling in the sheath on the chamber wall. Electron number density for the magnetic field |Bθ|max = 0.1 T is up to nine times higher than that for no field for our plasma dimensions. The multipolar confinement is effective when the mean free path of fast electrons is of the order or larger than the discharge size. In order to give design criteria of the magnet system, the effects of magnetic field, number of magnetic poles, and gas pressure on the plasma density are examined systematically.

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