Abstract
A specific particle-in-cell Monte Carlo model which is based on an optimized free path method for collision treatment has been used to simulate a radiofrequency (RF) argon discharge at low pressure for parallel-plate geometry. In this model, the free path determination is independent of the electron energy; it depends only on the maximum of the total cross sections. The obtained results are in excellent agreement with experimental results taken from previous literature in the case of RF discharge in argon. Furthermore, the present model is faster than the classical one based on free time of flight method extensively used to study the low pressure electrical discharges. Key words: PIC MC technique, radiofrequency low pressure discharge, free path for collision treatment.
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