Abstract
This paper presents the results, analysis and discussions of parametric studies of diamond-like carbon (DLC) thin films by pulsed Nd:YAG laser deposition. Effects on the DLC properties and growth rate were investigated by varying the deposition parameters, namely the laser wavelength and fluence, substrate and temperature. For characterization, visible Raman spectroscopy, current-voltage measurement, optical interferometry, and optical absorption technique were employed. Comparisons were made with previous work by other workers who had also employed pulsed Nd:YAG lasers. The results also supported the subplantation mechanism for DLC formation.
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