Abstract
The data gained on discharge pumped XeCl laser systems over the last 15 years were analyzed to identify common inherent regularities. It is obvious that there are three major classes of phenomena involved, namely: the electrical processes in the pumping circuit, the plasma-chemical kinetics, and the discharge contraction. It has been demonstrated that under certain conditions they can be considered separately. Such an approach allows one to estimate a priori the optimal pumping conditions and the electrical circuit parameters to obtain the required laser energy. The results presented could be used in the engineering calculations of high-performance excimer laser systems to significantly reduce the cost of the design and the optimization stages.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
