Abstract
In the area of MEMS design, modeling and simulation of MEMS device are always the most popular topics and are also very important in MEMS design process. Due to the 3D microstructure and mechanical characteristic of MEMS device, the paper proposes a visualized modeling method for MEMS with parameterized components-Virtual Assembly. Virtual Assembly not only contains 3D topology construction and assembly, but also contains dynamic model synthesis for modeling the dynamic model of whole device. By using parameterized components in a component library, Virtual Assembly could assemble the 3D topology and dynamic model of MEMS device. The parameterized component library is the foundation of Virtual Assembly. Together with the visualized mechanical simulation tool-Virtual Operation, it could implement more flexible and rapid modeling and simulation of MEMS.
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