Abstract
Diamond surface oxidation by atomic oxygen, annealing up to ∼700°C, and in situ exposure to thermally activated hydrogen were studied by high resolution electron energy loss spectroscopy (HREELS). After atomic oxygen (AO) exposure, HREELS revealed peaks associated with CHx groups, carbonyl, ether, and peroxide-type species and strong quenching of the diamond optical phonon and its overtones. Upon annealing of the oxidized surfaces, the diamond optical phonon overtones at 300 and 450meV emerge and carbonyl and peroxide species gradually desorb. The diamond surface was not completely regenerated after annealing to ∼700°C and in situ exposure to thermally activated hydrogen, probably due to the irreversible deterioration of the surface by AO.
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