Abstract
AbstractThe kinetics of the wet oxidation process of MBE-grown high-Al-content AlAs/Al0.6Ga0.4As short-period superlattices (SPSLs) was investigated and compared to AlGaAs alloys and pure AlAs. We found that alloys and superlattices (SLs) have different oxidation characteristics. These differences were attributed to traces of the superlattice structure in the oxidized material. The microstructure and chemistry of SPSLs with an equivalent composition of Al0.98Ga0.02As was studied, using transmission electron microscopy, energy-dispersive x-ray spectroscopy, Rutherford backscattering, and nuclear reaction analysis for hydrogen-profiling. We also report on the mechanical stability of oxidized SPSL layers in optoelectronic device structures.
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