Abstract

The oxidation behaviour of Ca-Si-Al-O-N-F oxynitride glass with different amount of fluorine was studied at 1000 °C in an air atmosphere. The anions contents were determined by X-ray photoelectron spectroscopy. The oxidation products and the morphology of the oxide layers were examined by X-ray diffraction and scanning electron microscopy, respectively. The results show that the oxidation products were mainly kyanite and gehlenite. With the introduction of fluorine, the oxide layer becomes dense, and the thickness of the oxide layer becomes thinner. These investigations reveal that the introduction of a small amount of fluorine into oxynitride glass can enhance the ability to resist oxidation.

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