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Abstract
The dynamic behavior of a rectangular cantilever in high-speed atomic force microscopy (AFM) in constant-height mode is studied. Experiments were first performed to observe how the AFM cantilever responds to a surface steplike structure. Oscillatory motions of the cantilever tip occuring in the structure were then simulated based on the damped point-mass model. Simulation results are in agreement with the experimental observation. The effects of resonance frequency and spring constant on oscillation were simulated as important parameters of the cantilever. Those results would be helpful for the understanding and analysis of the dynamic behavior of a cantilever in high-speed AFM.
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