Abstract
Microengineered silicon structures are presently being investigated in a number of laboratories for use as resonant sensing elements in optically addressed fibre optic sensors. In this paper we present the preliminary results on the effect of chromium coating on the optothermal excitation of silicon resonators. Measurement of the Q factor has shown that the chromium layer introduces additional loss approximately proportional to the chromium thickness. Typically, an uncoated device with a Q of 20 000 will have a Q of about 7000 when coated with a chromium layer of 400 Å. Nevertheless the chromium layer can significantly increase the amplitude of oscillation, by a factor of four, for example. Maximum response is obtained for a layer thickness of about 200 Å in our samples.
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