Abstract
Photonics crystal optomechanical cavities fabricated on a commercial CMOS-compatible foundry are demonstrated. Despite the limited foundry design rules we could achieve a ultra-high Q (9.1 × 105) photonic crystals and optomechanical crystal cavities with large coupling rate (g0 = 60 KHz).
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
