Abstract
Characteristics have been investigated for both KrF excimer-laser light and KrF excimer-laser crystallization of Si thin films. The results were applied to design an optical system for growing densely packed and large grains. A high-resolution beam profiler confirmed that the laser light intensity distribution on the sample surface had a nearly ideal triangular form with a maximum-to-minimum intensity ratio of approximately 2, as designed. This distribution could grow 5-µm-long grains with a packing efficiency close to 100% by a single laser light pulse.
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