Abstract
Significant improvements in the experimental setup of Micro-Raman (μRS) and Micro-Photoluminescence-Spectroscopy (μPL) for solar cell characterization are reported. The lateral resolution of doping density mapping with μRS is improved to below 200nm. A highly resolved measurement on an aluminum BSF demonstrates the increase in resolution. Furthermore, the characterization of thin silicon layers within the same experimental setup is presented. An excitation source with low penetration depth is used to screen out background signal from the substrate. Finally, a surface topography mapping technique is implemented to extend μRS and μPL to uneven surfaces. With this extension micro cracks in conventionally textured silicon solar cells could be successfully characterized.
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