Abstract
The impact of Ta thickness on magnetic anisotropy and interlayer magnetic coupling is evaluated for the Ta-FeCoB-MgO thin film system commonly used in magnetic tunnel junctions. It is shown that there exists a window of Ta thickness where strong magnetic coupling of FeCoB with another magnetic layer is achievable through Ta while still maintaining properties required for use in a perpendicular magnetic tunnel junction. We also expand on existing knowledge about the role of annealing temperature, film composition, and seedlayer sequence on magnetic anisotropy in Ta/FeCoB/MgO tri-layers of varying FeCoB thickness.
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