Abstract
This paper describes the optimization of the existing technology for the fabrication of superconducting films and high-quality tunnel junctions on a magnetron sputtering facility. To expand the frequency range to 1.1 THz and to obtain the limiting parameters of superconducting elements, the regimes of production of Nb, NbN, NbTiN films were optimized. These films are used to fabricate superconductor-insulator-superconductor Nb/Al--AlN/NbN tunnel junctions. Al and NbTiN films are required to create receiving elements at frequencies above 700 GHz (the cutoff frequency for niobium); such structures are being developed for the radio astronomy array receiver located in the Atacama Pathfinder Experiment telescope. Keywords: superconductivity, tunnel junctions, magnetron sputtering, thin films.
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