Abstract
Journal Article Optimization of EDX Tomography Acquisition Geometry for Electronic Device Characterization Get access Frieder Baumann, Frieder Baumann GLOBALFOUNDRIES, Inc., Malta, New York, United States Search for other works by this author on: Oxford Academic Google Scholar Travis Mitchell, Travis Mitchell GLOBALFOUNDRIES, Inc., Malta, New York, United States Search for other works by this author on: Oxford Academic Google Scholar Dirk Utess, Dirk Utess GLOBALFOUNDRIES, Dresden, Sachsen, Germany Search for other works by this author on: Oxford Academic Google Scholar Christian Hobert Christian Hobert GLOBALFOUNDRIES, Dresden, Sachsen, Germany Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 26, Issue S2, 1 August 2020, Pages 660–662, https://doi.org/10.1017/S1431927620015433 Published: 01 August 2020
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