Optimization Design of Aerostatic Bearings with Square Micro-Hole Arrayed Restrictor for the Improvement of Stability: Theoretical Predictions and Experimental Measurements

Abstract

Aerostatic bearings are widely used in ultra-precision manufacturing equipment as a crucial support component. However, turbulent vortices in the recess can induce micro-vibration of the aerostatic bearing, which can severely affect stability. To further suppress the formation of turbulent vortices and reduce the micro-vibration, an aerostatic bearing with a square micro-hole arrayed restrictor (SMAR) was designed and the influences of structural parameters of the SMAR on its static and dynamic performance were investigated using numerical simulations and experiments. The transient flow characteristics of aerostatic bearings with different numbers and spacing of micro-holes were studied using 3D large eddy simulation (LES), and the formation mechanism of turbulent vortices and the law of turbulent interaction between adjacent micro-holes were analyzed. The static performance and micro-vibration of the aerostatic bearing were measured experimentally to verify the effectiveness of the SMAR. The results show that the formation of turbulent vortices and micro-vibrations can be effectively reduced by the optimized design of the SMAR, while the static performance of the bearing is basically unchanged. The micro-vibration decreases rapidly with the number of micro-holes ranging from 1 to 36 and remains steady with the number of micro-holes ranging from 36 to 100. The micro-vibration decreases rapidly with the spacing of micro-holes ranging from 2 dn to 8 dn and remains steady with the spacing of micro-holes ranging from 8 dn to 10 dn. This study contributes to further understanding the mechanism of turbulent vortex formation in aerostatic bearings with a SMAR.