Abstract
This paper reports a more complete description of the design process of the Center Support Quadruple Mass Gyroscope (CSQMG), a gyro expected to provide breakthrough performance for flat structures. The operation of the CSQMG is based on four lumped masses in a circumferential symmetric distribution, oscillating in anti-phase motion, and providing differential signal extraction. With its 4-fold symmetrical axes pattern, the CSQMG achieves a similar operation mode to Hemispherical Resonant Gyroscopes (HRGs). Compared to the conventional flat design, four Y-shaped coupling beams are used in this new pattern in order to adjust mode distribution and enhance the synchronization mechanism of operation modes. For the purpose of obtaining the optimal design of the CSQMG, a kind of applicative optimization flow is developed with a comprehensive derivation of the operation mode coordination, the pseudo mode inhibition, and the lumped mass twisting motion elimination. The experimental characterization of the CSQMG was performed at room temperature, and the center operation frequency is 6.8 kHz after tuning. Experiments show an Allan variance stability 0.12°/h (@100 s) and a white noise level about 0.72°/h/√Hz, which means that the CSQMG possesses great potential to achieve navigation grade performance.
Highlights
In view of the fact microelectromechanical systems (MEMS) technology is rapidly developing, it has been possible to create gyroscopes with small size, low weight, low cost, and low power under the premise of high precision
Most MEMS gyros are of the vibratory type, and high sensitivity dual-mass Tuning Fork Gyros (TFGs) play an important role
In the tuning fork design, linear acceleration/shock signals are rejected by its symmetric tuning fork architecture [4,5], the performance and environmental robustness are limited by the asymmetric sense mode [6,7]
Summary
In view of the fact microelectromechanical systems (MEMS) technology is rapidly developing, it has been possible to create gyroscopes with small size, low weight, low cost, and low power under the premise of high precision. As the exploration of processes such as glass blowing, etching, and integratedresonators precision machining have been studied fabrication technology has made the micro HRG become new research hotspot, the tonew create high precision. CSQMG achieves similar operation modes to HRGs The CSQMG can achieve the same environmental robustness as HRGs. Along with the benefits of the new design, the parameters of a single beam affect the stiffness acting on more than one direction, which means more factors should be considered in the traditional. Along with the benefits of the new design, the parameters of a single beam affect the stiffness acting on more than one direction, which means more factors should be considered in the traditional structure optimization time, thethe lumped masses with twotwo support points can structure optimization processes. An optimization flow based on the model is concluded, is concluded, and thedesign comprehensive design parameters of Section the gyro are given the in fabrication
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