Abstract
Abstract In this paper, an optimal data-driven modeling-free differential-inversion-based iterative control (OMFDIIC) method is proposed for both high performance and robustness in the presence of random disturbances. Achieving high accuracy and fast convergence is challenging as the system dynamics behaviors vary due to the external uncertainties and the system bandwidth is limited. The aim of the proposed method is to compensate for the dynamics effect without modeling process and achieve both high accuracy and robust convergence, by extending the existed modeling-free differential-inversion-based iterative control (MFDIIC) method through a frequency- and iteration-dependent gain. The convergence of the OMFDIIC method is analyzed with random noise/disturbances considered. The developed method is applied to a wafer stage, and shows a significant improvement in the performance.
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