Abstract
High Power Laser System (HPLS) is a large optical instrument, provides extremely high temperature and pressure conditions for inertial confinement fusion (ICF) and high-energy-physics research. It contains large number of optics and which would be easily damaged due to high fluence of laser power. The contamination control of optical surfaces has a great significance to ensure the performance of the system and decrease costs. This paper discussed the background and development of cleanliness control techniques in high power laser systems, including contamination induced laser damage (CILD), contamination inspection, optical surface cleanliness degradation and maintaining.
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