Abstract
The optical, electrical and mechanical properties of TiN W Au films deposited by RF sputtering are investigated as a function of the number and thickness of interlayers W Au and compared to those of conventional tlectroplated Au films. The multilayered Tin W Au films have a golden yellow aolor and their reflectivity reaches 98% of that of electroplated 24K Au films over the wavelength range studied. The electrical sheet resistance of Tin W Au films was found to be in the range of 1.53 to 3.15 Ω cm −2. Various analytical techniques were used: Auger electron spectroscopy to determine the composition profiles, direct tensile tests for adhesion characteristics, the optical rub test for scratch resistance, the selected ordinate method to identify the color of resultant films, and the four-point method for sheet resistance measurement.
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