Abstract
In order to develop an electro-optic waveguide, Pb(Zr, Ti)O 3 ceramic ferroelectric thin films were elaborated by a modified sol–gel process on glass substrate. In the aim to study the optical properties of the PZT films, an accurate refractive index and thickness measurement apparatus was set up, which is called M-lines device. An evaluation of experimental uncertainty and calculation of the precision of the refractive index and thickness were developed on PZT layers. Two different processes of PZT elaboration were made and studied with this apparatus. The reproducibility of one fabrication process was tested and results are presented in this paper.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
