Abstract

Iron disilicide thin films are prepared on fused quartz usingfemtosecond laser deposition (FsPLD) with a FeSi2 alloy target.X-ray diffraction results indicate the films are single-phase,orthorhombic, β-FeSi2. Field scanning electron microscopy, highresolution transmission electron microscopy, UV–VIS–NIR spectroscopyand Raman microscope are used to characterize the structure,composition, and optical properties of the β-FeSi2 films. Normalincidence spectral transmittance and reflectance data indicate aminimum, direct energy gap of 0.85 eV. The two most intense lines ofRaman scattering peaked at 181.3 cm−1 and 235.6 cm−1 forthe film on fused quartz, and at 191.2 cm−1 and 243.8 cm−1for the film on Si (100), are observed.

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