Abstract
We report on optical channel waveguides in zinc selenide (ZnSe) single crystal fabricated by using mask-assisted 500 keV protons implantation at a fluence of 6 × 1016 ions/cm2. The formed waveguides are with typical “enhanced well” + “negative barrier” refractive index profile. The numerical calculated modal profiles are in good agreement with the measured near-field intensity distribution of the guided light. The propagation loss of the channel waveguide is determined to be ~4 dB/cm after thermal annealing treatment in air.
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