Abstract

Abstract This paper describes optical beam deflectors using piezoelectric bimorphs with both ends clamped. In these deflectors, the bimorph must bend so that a mirror affixed onto its central position tilts by applying voltage. The poling configuration which enables the bimorph to generate such a deformation has been analyzed. Deflectors for both one- and two-dimensional operations have been individually fabricated and investigated based on this analytical result. The maximum optical beam deflection and resonance frequency were about 20 mrad and 3.3 kHz, respectively, for a one-dimensional operation deflector. The values were about 16 mrad and 3.0 kHz, respectively, for a two-dimensional operation deflector.

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