Abstract
In this work, a reactive DC magnetron sputtering technique was used to prepare TiO2 thin films. The variation in argon and oxygen gases mixing ratios (4:1, 2:1, 1:1, 1:2, 1:4) was used to achieve optimal properties for gas sensing. In addition, an analysis of the optical XRD properties of TiO2 thin films is presented. High-quality and uniform nanocrystalline films were obtained at a working gas pressure of 0.25 mbar and 1:4 (Ar/O2) gas mixture. The optical properties showed a transparent thin film with uniform adherence to the substrate. The average transmission of the TiO2 films deposited on the glass substrates was higher than 95% over the range of 400 to 800 nm. The optical band gap varied from 3.84 eV to 3.93 eV as a function of oxygen/argon ratios. The XRD pattern showed that the films have an amorphous structure, which is shifted to polycrystalline with increasing oxygen to argon ratio. The sensitivity, response time, and recovery time were measured for TiO2 thin films using NO2 oxidizing gas.
Highlights
Titanium dioxide TiO2 films have good transmittance in the visible region along with chemical stability and high refractive index
This paper focuses on preparing surface conductivity of anatase TiO2 thin films deposited by a DC reactive magneto-sputtering technique
The behaviors were identical, which means that the TiO2 thin film gas sensors operate better at elevated temperatures when compared to the lower temperatures (
Summary
Titanium dioxide TiO2 films have good transmittance in the visible region along with chemical stability and high refractive index For this reason, they are extensively used in present and future applications related to electronics, photonics, sensing, catalysis, controlled drugs, and medicine [1]. Different deposition techniques can be used to form titanium oxides films, including thermal evaporation [2], electron beam evaporation [3], plasma-enhanced chemical vapor deposition [4], , spray pyrolysis [5], sol-gel method [6] and reactive DC magnetron sputtering [7]. The sensitivity, response time, and recovery time where studied for the TiO2 gas sensors fabricated as a function of working temperature
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