Abstract
The optical and photoemission properties of hydrogen-free DLC films prepared under conditions which result in different types of carbon bonding (previously determined from electron energy loss spectroscopy) are reported. The films were prepared using a mass selected ion beam deposition system covering the C + energy range 10 eV–2 keV, mostly on Si held at room temperature. Previous measurements have shown that the sp 3 content of these films varied from 0 to >80%. The optical constants ( n , k , absorption coefficient (α)) of these films were measured by ellipsometry. The energy gaps were derived from Tauc plots ( E g ) and from α = 10 4 cm −1 values ( E 04 ). The energy gaps were found to vary with the sp 3 content from E < 1 eV (10% sp 3 ) up to E = 2.4 eV (85% sp 3 ). The photoemission absolute quantum efficiencies of these films were independently measured in the UV region using a monochromator system and were compared to those of CVD diamond films and graphite.
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