Abstract
We have experimentally confirmed the film operation of an electrostatically-driven S-shaped film actuator in a liquid environment and investigated response time as the function of a micro-fluid-control device. The actuator has an S-shaped film element whose S-shape travels laterally by electrostatic force. We used a hand-made model of the actuator. Film operation was carried out during immersion in silicone oils of different viscosities. The film was able to be successfully operated by electrostatic force under all viscosity conditions. The film travel is separately discussed in two different regions, which are acceleration and terminal velocity motion. The terminal velocity of the S-bend was proportional to the square of the applied voltage and was inversely proportional to the viscosity of the silicone oil. The velocity was 90mm/s when the film driving voltage was 220V.
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