Abstract
The optical properties of an electrostatic retarding field lens, which consists of an einzel lens and a retarding field between its exit and the image plane, are analyzed using both analytical and numerical methods. The results show that such a compound lens can be well approximated by a combination of three optical components: the einzel lens, an aperture lens superimposed at its exit, and a uniform field between its exit and the image plane. When the distance between the exit and the image plane is long, and a strong retardation is required for forming a low energy beam, the performance of such a compound lens is dominated by the chromatic aberration of the retarding field. Using this lens and a liquid metal ion source, it is possible to form a low energy (100 eV) focused ion beam with a diameter and current density of 1000 A and 1 A/cm2, respectively.
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