Abstract
The analysis of the reasons causing degradation observed in resist layer during selective gold plating on patterns for MIC's has resulted in an excellent combination of electrolytic bath and photoresist type. Thick layers of gold (i.e. more than 10 μm) have been deposited by the method presented here over a period of about 1 h without any deterioration in the photoresist property. This combination can be used in the fabrication of beam lead devices with better results.
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