On geometrical dependencies of capacitive coupling voltage contrast

Abstract

The capacitive coupling voltage contrast and its dependencies on geometrical parameters of conduction lines and passivation were studied. Using test structures of various dimensions for the width of and the distance between conduction lines and with different passivations, the errors of capacitive coupling voltage contrast - namely the capacitive coupling error and the capacitive coupling crosstalk - were measured. For the same geometrical parameters the capacitively coupled signals to the passivation surface were calculated using the boundary element method. An correlation of experiment and simulation was thus possible. The comparison shows good agreement for the capacitive coupling cross talk. The measured capacitive coupling error is greater than predicted by the simulation, which is explained by local field effects. The geometrical dependencies found in the measurements are well described by the theory.