Abstract
We report on the fabrication of three-dimensional (3D) high-Q whispering gallery microcavities on a fused silica chip by femtosecond laser microfabriction, enabled by the 3D nature of femtosecond laser direct writing. The processing mainly consists of formation of freestanding microdisks by femtosecond laser direct writing and subsequent wet chemical etching. CO(2) laser annealing is followed to smooth the microcavity surface. Microcavities with arbitrary tilting angle, lateral and vertical positioning are demonstrated, and the quality (Q)-factor of a typical microcavity is measured to be up to 1.07 × 10(6), which is currently limited by the low spatial resolution of the motion stage used during the laser patterning and can be improved with motion stages of higher resolutions.
Highlights
Whispering gallery mode (WGM) optical microcavities, that trap light via the total internal reflection at the circular boundary formed between the dielectric cavity and surroundings, exhibit very high quality (Q)-factors and very small volume
Femtosecond laser micromachining has been proved as a promising solution for high-precision and flexible fabrication of three dimensional (3D) microstructures, such as microoptics [7,8], microfluidic laser [9], hollow waveguide [10], microfluidic channels [11] and polymer-based microcavities [12,13,14]
By applying femtosecond laser direct writing method, we demonstrate a new way to realization of 3D high-Q microcavities on fused silica wafer that may have the light output from optical mode on arbitrary planes respect to substrate plane
Summary
Whispering gallery mode (WGM) optical microcavities, that trap light via the total internal reflection at the circular boundary formed between the dielectric cavity and surroundings, exhibit very high quality (Q)-factors and very small volume. By applying femtosecond laser direct writing method, we demonstrate a new way to realization of 3D high-Q microcavities on fused silica wafer that may have the light output from optical mode on arbitrary planes respect to substrate plane.
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
