Abstract
An ultrasonic dry cleaning system is a kind of air-blowing cleaning system, which clears away fine particles of dust adhering to a surface. This system does not require high cost consumables such as highly pure gases or chemical solvents. Moreover it removes micro contaminant particles without additional cooling or heating processes. In this paper, a numerical simulation of the ultrasonic dry cleaning system was carried out to propose an optimum ultrasonic generator. We evaluated the flow in the chamber according to the groove shape of ultrasonic generator, and system operating pressure using a commercial fluid dynamic simulation tool. And the trend of the sound pressure level (SPL) according to frequency was checked to determine whether or not the ultrasonic generator module could generate an ultrasonic wave. The particle trajectories were compared for several conditions and particle sizes. We confirmed that an ultrasonic wave of sufficient flow velocity can be generated through the ultrasonic generator module. And the changes of SPL according to the system operating pressure and the shape of the ultrasonic generator groove were confirmed respectively.
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