Abstract
The modeling of gas flow through a multi-stage flowing part of a turbomolecular vacuum pump to optimize the parameters of rotor and stator impeller wheels is considered. The developed program of statistical modeling by the Monte Carlo method allows us to determine the influence of the geometric parameters of the stages on the pump performance indicators. Keywords turbomolecular pump, impeller wheels, maximum action speed, maximum pressure ratio, Monte Carlo method. marc081939@gmail.com
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