Abstract
The effect on the gas flow field, temperature field, and deposition rate of zinc oxide in commercial metal-organic chemical vapor deposition was numerically investigated in three dimensions. The proposed three-dimensional reaction chamber model is used for numerical simulation and experimental verification. However, under the process conditions, there is a large eddy in the reaction chamber because of the influence of buoyancy and rotational force, which affects the stability of the flow field. The presence of vortices can adversely affect interface steepness, surface morphology, and doping uniformity. However, porous media play a good role in flow stability. Accordingly, a reasonable porous medium with an appropriate distance between a porous medium and a susceptor was developed to reduce pre-reaction, improve flow stability, and increase the ZnO deposition rate.
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