Abstract
In this paper, a novel structure of controllable of photonic mirror (NSM) has been fabricated by atomic layer deposition (ALD) coating technique on a polystyrene (PS) nanosphere template. A 30nm ALD Al2O3 film was coated on the reduced PS nanopshere, the removal of PS nanosphere was burned in atmosphere at 300°C to form the Al2O3 hollow nanosphere, and then a 80nm indium tin oxide (ITO) film was sputtered on the hollow nanosphere as a top electrode. The results show that the application of NSM can control the reflectance with a tiny value of 0.003% per 0.1V of bias treatment.
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