Abstract
We examine using the harmonics of low fundamental frequency (f(1)) square waveforms to electrostatically excite higher-order flexural modes of a micromechanical structure in higher (>f(1)) frequency regimes. Square wave signals swept between a fundamental frequency range of approximately 0-333 kHz demonstrated an effective high magnitude spectral excitation of approximately 0-1 MHz. This enabled optical heterodyne detection of structural resonant frequencies above 333 kHz. Low frequency square wave signals were also used to selectively excite modes at higher frequencies.
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