Noncontact optical displacement measurements by dynamic contrast auto focusing for slow oscillatory motion

Abstract

A noncontact displacement system suitable for tracking slow moving surfaces with low reflectivity is demonstrated. The displacement is measured by dynamic tracking of the moving focal plane of the sample under test. The system comprises a camera, a vertical digital piezo driver, and a data acquisition module. The tracking effect is achieved by continuously driving the sample with a 2-μm sweep around the focal plane, simultaneously acquiring the sample position and images of the part of the sample defined as a region of interest (ROI). The position of the focal plane is identified by fitting the contrast of the ROI versus the stage position to a Gaussian function. Using an ROI provides the ability to test various regions across the object and eliminates the demand for the surface to be flat or reflective. The system is low cost, is applicable to a large variety of samples and has an accuracy better than 10 nm.