Abstract
Macroporous (mp-) In 2O 3-based microspheres as a NO 2 sensing material were prepared by the pyrolysis of atomized In(NO 3) 3 aqueous solutions containing polymethylmethacrylate (PMMA) microspheres (150 nm in diameter) as a template. Well-developed spherical macropores (less than 100 nm in diameter) reflecting the morphology of the PMMA microsphere templates could be formed in the In 2O 3-based microspheres. The introduction of macropores into In 2O 3-based microspheres was very effective in improving the NO 2 response of their thick films fabricated on an alumina substrate equipped with interdigitated Pt electrodes (gap size: ca. 200 μm) by screen-printing. In addition, the addition of a little amount of SnO 2 to the mp-In 2O 3 microspheres not only lowered the resistance in air but also improved the NO 2 response. NO 2 sensing properties of non-stacked microspheres of the mp-In 2O 3 mixed with SnO 2 were also investigated by utilizing nano-gap Au electrodes (gap size: ca. 200 nm). The non-stacked microspheres showed fast response and recovery speeds to NO 2, because of better diffusion capability of NO 2.
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