Abstract
Ultrafine SiC, Si 3N 4 and Si/C/N powders in the nanometric range (<100nm) have been synthesized by laser driven reactions. Mixtures of SiH 4 C 2H 2 (or CH 3SiH 3), SiH 4 NH 3 and SiH 4 CH 3NH 2 NH 3 have been irradiated by a high power continuous wave CO 2 laser in a crossflow configuration cell. By varying the reaction conditions (flow rates and ratios of the reacting gases, laser power), amorphous to crystalline powders of variable size were formed. The powders were investigated by 29Si and 13C solid state NMR. A comparison of the different spectra obtained provides information on the local structure and composition of the materials.
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